JPH0438034U - - Google Patents
Info
- Publication number
- JPH0438034U JPH0438034U JP7966390U JP7966390U JPH0438034U JP H0438034 U JPH0438034 U JP H0438034U JP 7966390 U JP7966390 U JP 7966390U JP 7966390 U JP7966390 U JP 7966390U JP H0438034 U JPH0438034 U JP H0438034U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- fan
- heat treatment
- gas
- treatment apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000003756 stirring Methods 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7966390U JPH0438034U (en]) | 1990-07-26 | 1990-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7966390U JPH0438034U (en]) | 1990-07-26 | 1990-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0438034U true JPH0438034U (en]) | 1992-03-31 |
Family
ID=31624023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7966390U Pending JPH0438034U (en]) | 1990-07-26 | 1990-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438034U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010093067A (ja) * | 2008-10-08 | 2010-04-22 | Koyo Thermo System Kk | 基板の熱処理装置 |
| JP2010093069A (ja) * | 2008-10-08 | 2010-04-22 | Koyo Thermo System Kk | 基板の熱処理装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5138870A (ja) * | 1974-09-27 | 1976-03-31 | Sharp Kk | Handotaiseizosochi |
| JPH01164024A (ja) * | 1987-12-21 | 1989-06-28 | Fujitsu Ltd | 気相エピタキシャル成長装置 |
-
1990
- 1990-07-26 JP JP7966390U patent/JPH0438034U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5138870A (ja) * | 1974-09-27 | 1976-03-31 | Sharp Kk | Handotaiseizosochi |
| JPH01164024A (ja) * | 1987-12-21 | 1989-06-28 | Fujitsu Ltd | 気相エピタキシャル成長装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010093067A (ja) * | 2008-10-08 | 2010-04-22 | Koyo Thermo System Kk | 基板の熱処理装置 |
| JP2010093069A (ja) * | 2008-10-08 | 2010-04-22 | Koyo Thermo System Kk | 基板の熱処理装置 |